11/3/2010	3:03:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2010	3:03:12 PM	Recipe started at 3:03 PM
11/3/2010	3:03:12 PM	H2 valve closed
11/3/2010	3:03:12 PM	BCl3 valve closed
11/3/2010	3:03:12 PM	PH3 valve closed
11/3/2010	3:03:12 PM	SiCl4 pre valve closed
11/3/2010	3:03:12 PM	SiCl4 post valve closed
11/3/2010	3:03:12 PM	Main Vac valve closed
11/3/2010	3:03:12 PM	Bypass valve closed
11/3/2010	3:03:12 PM	Bubbler valve closed
11/3/2010	3:03:12 PM	Helium valve opened
11/3/2010	3:03:12 PM	Helium MFC set to  500.000000
11/3/2010	3:03:12 PM	H2 MFC set to  0.000000
11/3/2010	3:03:12 PM	BCl3 MFC set to  0.000000
11/3/2010	3:03:12 PM	PHl3 MFC set to  0.000000
11/3/2010	3:03:12 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:03:12 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:03:13 PM	Tube furnace set to 0
11/3/2010	3:04:32 PM	Helium valve closed
11/3/2010	3:04:32 PM	H2 valve closed
11/3/2010	3:04:32 PM	BCl3 valve closed
11/3/2010	3:04:32 PM	PH3 valve closed
11/3/2010	3:04:32 PM	SiCl4 pre valve closed
11/3/2010	3:04:32 PM	SiCl4 post valve closed
11/3/2010	3:04:32 PM	Main Vac valve closed
11/3/2010	3:04:32 PM	Bypass valve closed
11/3/2010	3:04:32 PM	Bubbler valve closed
11/3/2010	3:04:32 PM	Helium MFC set to  0.000000
11/3/2010	3:04:32 PM	H2 MFC set to  0.000000
11/3/2010	3:04:32 PM	BCl3 MFC set to  0.000000
11/3/2010	3:04:32 PM	PHl3 MFC set to  0.000000
11/3/2010	3:04:32 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:04:32 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:04:33 PM	Tube furnace set to 0
11/3/2010	3:04:33 PM	Run finished at 3:04 PM
11/3/2010	3:04:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/3/2010	3:08:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2010	3:08:27 PM	Recipe started at 3:08 PM
11/3/2010	3:08:27 PM	Helium valve closed
11/3/2010	3:08:27 PM	H2 valve closed
11/3/2010	3:08:27 PM	BCl3 valve closed
11/3/2010	3:08:27 PM	PH3 valve closed
11/3/2010	3:08:27 PM	SiCl4 pre valve closed
11/3/2010	3:08:27 PM	SiCl4 post valve closed
11/3/2010	3:08:27 PM	Main Vac valve closed
11/3/2010	3:08:27 PM	Bubbler valve closed
11/3/2010	3:08:27 PM	Bypass valve opened
11/3/2010	3:08:27 PM	Helium MFC set to  0.000000
11/3/2010	3:08:27 PM	H2 MFC set to  0.000000
11/3/2010	3:08:27 PM	BCl3 MFC set to  0.000000
11/3/2010	3:08:27 PM	PHl3 MFC set to  0.000000
11/3/2010	3:08:27 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:08:27 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:08:27 PM	Tube furnace set to 0
11/3/2010	3:09:18 PM	Helium valve closed
11/3/2010	3:09:18 PM	H2 valve closed
11/3/2010	3:09:18 PM	BCl3 valve closed
11/3/2010	3:09:18 PM	PH3 valve closed
11/3/2010	3:09:18 PM	SiCl4 pre valve closed
11/3/2010	3:09:18 PM	SiCl4 post valve closed
11/3/2010	3:09:18 PM	Bubbler valve closed
11/3/2010	3:09:18 PM	Main Vac valve opened
11/3/2010	3:09:18 PM	Bypass valve opened
11/3/2010	3:09:18 PM	Helium MFC set to  0.000000
11/3/2010	3:09:18 PM	H2 MFC set to  0.000000
11/3/2010	3:09:18 PM	BCl3 MFC set to  0.000000
11/3/2010	3:09:18 PM	PHl3 MFC set to  0.000000
11/3/2010	3:09:18 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:09:18 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:09:18 PM	Tube furnace set to 0
11/3/2010	3:09:18 PM	Run finished at 3:09 PM
11/3/2010	3:09:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2010	3:31:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/3/2010	3:31:28 PM	Recipe started at 3:31 PM
11/3/2010	3:31:28 PM	Helium valve closed
11/3/2010	3:31:28 PM	H2 valve closed
11/3/2010	3:31:28 PM	BCl3 valve closed
11/3/2010	3:31:28 PM	PH3 valve closed
11/3/2010	3:31:28 PM	SiCl4 pre valve closed
11/3/2010	3:31:28 PM	SiCl4 post valve closed
11/3/2010	3:31:28 PM	Main Vac valve closed
11/3/2010	3:31:28 PM	Bubbler valve closed
11/3/2010	3:31:28 PM	Bypass valve opened
11/3/2010	3:31:28 PM	Helium MFC set to  0.000000
11/3/2010	3:31:28 PM	H2 MFC set to  0.000000
11/3/2010	3:31:28 PM	BCl3 MFC set to  0.000000
11/3/2010	3:31:28 PM	PHl3 MFC set to  0.000000
11/3/2010	3:31:28 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:31:28 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:31:28 PM	Tube furnace set to 0
11/3/2010	3:31:29 PM	Helium valve closed
11/3/2010	3:31:29 PM	H2 valve closed
11/3/2010	3:31:29 PM	BCl3 valve closed
11/3/2010	3:31:29 PM	PH3 valve closed
11/3/2010	3:31:29 PM	SiCl4 pre valve closed
11/3/2010	3:31:29 PM	SiCl4 post valve closed
11/3/2010	3:31:29 PM	Bubbler valve closed
11/3/2010	3:31:29 PM	Main Vac valve opened
11/3/2010	3:31:29 PM	Bypass valve opened
11/3/2010	3:31:29 PM	Helium MFC set to  0.000000
11/3/2010	3:31:29 PM	H2 MFC set to  0.000000
11/3/2010	3:31:29 PM	BCl3 MFC set to  0.000000
11/3/2010	3:31:29 PM	PHl3 MFC set to  0.000000
11/3/2010	3:31:29 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:31:29 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:31:29 PM	Tube furnace set to 0
11/3/2010	3:32:29 PM	H2 valve closed
11/3/2010	3:32:29 PM	BCl3 valve closed
11/3/2010	3:32:29 PM	PH3 valve closed
11/3/2010	3:32:29 PM	SiCl4 pre valve closed
11/3/2010	3:32:29 PM	SiCl4 post valve closed
11/3/2010	3:32:29 PM	Bubbler valve closed
11/3/2010	3:32:29 PM	Helium valve opened
11/3/2010	3:32:29 PM	Main Vac valve opened
11/3/2010	3:32:29 PM	Bypass valve opened
11/3/2010	3:32:29 PM	Helium MFC set to  100.000000
11/3/2010	3:32:29 PM	H2 MFC set to  0.000000
11/3/2010	3:32:29 PM	BCl3 MFC set to  0.000000
11/3/2010	3:32:29 PM	PHl3 MFC set to  0.000000
11/3/2010	3:32:29 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:32:29 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:32:29 PM	Tube furnace set to 0
11/3/2010	3:33:29 PM	Helium valve closed
11/3/2010	3:33:29 PM	H2 valve closed
11/3/2010	3:33:29 PM	BCl3 valve closed
11/3/2010	3:33:29 PM	PH3 valve closed
11/3/2010	3:33:29 PM	SiCl4 pre valve closed
11/3/2010	3:33:29 PM	SiCl4 post valve closed
11/3/2010	3:33:29 PM	Bubbler valve closed
11/3/2010	3:33:29 PM	Main Vac valve opened
11/3/2010	3:33:29 PM	Bypass valve opened
11/3/2010	3:33:29 PM	Helium MFC set to  0.000000
11/3/2010	3:33:29 PM	H2 MFC set to  0.000000
11/3/2010	3:33:29 PM	BCl3 MFC set to  0.000000
11/3/2010	3:33:29 PM	PHl3 MFC set to  0.000000
11/3/2010	3:33:29 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:33:29 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:33:29 PM	Tube furnace set to 0
11/3/2010	3:34:29 PM	H2 valve closed
11/3/2010	3:34:29 PM	BCl3 valve closed
11/3/2010	3:34:29 PM	PH3 valve closed
11/3/2010	3:34:29 PM	SiCl4 pre valve closed
11/3/2010	3:34:29 PM	SiCl4 post valve closed
11/3/2010	3:34:29 PM	Bubbler valve closed
11/3/2010	3:34:29 PM	Helium valve opened
11/3/2010	3:34:29 PM	Main Vac valve opened
11/3/2010	3:34:29 PM	Bypass valve opened
11/3/2010	3:34:29 PM	Helium MFC set to  100.000000
11/3/2010	3:34:29 PM	H2 MFC set to  0.000000
11/3/2010	3:34:29 PM	BCl3 MFC set to  0.000000
11/3/2010	3:34:29 PM	PHl3 MFC set to  0.000000
11/3/2010	3:34:29 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:34:29 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:34:29 PM	Tube furnace set to 0
11/3/2010	3:35:29 PM	Helium valve closed
11/3/2010	3:35:29 PM	H2 valve closed
11/3/2010	3:35:29 PM	BCl3 valve closed
11/3/2010	3:35:29 PM	PH3 valve closed
11/3/2010	3:35:29 PM	SiCl4 pre valve closed
11/3/2010	3:35:29 PM	SiCl4 post valve closed
11/3/2010	3:35:29 PM	Bubbler valve closed
11/3/2010	3:35:29 PM	Main Vac valve opened
11/3/2010	3:35:29 PM	Bypass valve opened
11/3/2010	3:35:29 PM	Helium MFC set to  0.000000
11/3/2010	3:35:29 PM	H2 MFC set to  0.000000
11/3/2010	3:35:29 PM	BCl3 MFC set to  0.000000
11/3/2010	3:35:29 PM	PHl3 MFC set to  0.000000
11/3/2010	3:35:29 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:35:29 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:35:30 PM	Tube furnace set to 0
11/3/2010	3:36:30 PM	H2 valve closed
11/3/2010	3:36:30 PM	BCl3 valve closed
11/3/2010	3:36:30 PM	PH3 valve closed
11/3/2010	3:36:30 PM	SiCl4 pre valve closed
11/3/2010	3:36:30 PM	SiCl4 post valve closed
11/3/2010	3:36:30 PM	Bubbler valve closed
11/3/2010	3:36:30 PM	Helium valve opened
11/3/2010	3:36:30 PM	Main Vac valve opened
11/3/2010	3:36:30 PM	Bypass valve opened
11/3/2010	3:36:30 PM	Helium MFC set to  100.000000
11/3/2010	3:36:30 PM	H2 MFC set to  0.000000
11/3/2010	3:36:30 PM	BCl3 MFC set to  0.000000
11/3/2010	3:36:30 PM	PHl3 MFC set to  0.000000
11/3/2010	3:36:30 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:36:30 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:36:30 PM	Tube furnace set to 0
11/3/2010	3:37:30 PM	Helium valve closed
11/3/2010	3:37:30 PM	H2 valve closed
11/3/2010	3:37:30 PM	BCl3 valve closed
11/3/2010	3:37:30 PM	PH3 valve closed
11/3/2010	3:37:30 PM	SiCl4 pre valve closed
11/3/2010	3:37:30 PM	SiCl4 post valve closed
11/3/2010	3:37:30 PM	Bubbler valve closed
11/3/2010	3:37:30 PM	Main Vac valve opened
11/3/2010	3:37:30 PM	Bypass valve opened
11/3/2010	3:37:30 PM	Helium MFC set to  0.000000
11/3/2010	3:37:30 PM	H2 MFC set to  0.000000
11/3/2010	3:37:30 PM	BCl3 MFC set to  0.000000
11/3/2010	3:37:30 PM	PHl3 MFC set to  0.000000
11/3/2010	3:37:30 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:37:30 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:37:30 PM	Tube furnace set to 0
11/3/2010	3:38:30 PM	H2 valve closed
11/3/2010	3:38:30 PM	BCl3 valve closed
11/3/2010	3:38:30 PM	PH3 valve closed
11/3/2010	3:38:30 PM	SiCl4 pre valve closed
11/3/2010	3:38:30 PM	SiCl4 post valve closed
11/3/2010	3:38:30 PM	Bubbler valve closed
11/3/2010	3:38:30 PM	Helium valve opened
11/3/2010	3:38:30 PM	Main Vac valve opened
11/3/2010	3:38:30 PM	Bypass valve opened
11/3/2010	3:38:30 PM	Helium MFC set to  100.000000
11/3/2010	3:38:30 PM	H2 MFC set to  0.000000
11/3/2010	3:38:30 PM	BCl3 MFC set to  0.000000
11/3/2010	3:38:30 PM	PHl3 MFC set to  0.000000
11/3/2010	3:38:30 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:38:30 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:38:30 PM	Tube furnace set to 0
11/3/2010	3:39:30 PM	Helium valve closed
11/3/2010	3:39:30 PM	H2 valve closed
11/3/2010	3:39:30 PM	BCl3 valve closed
11/3/2010	3:39:30 PM	PH3 valve closed
11/3/2010	3:39:30 PM	SiCl4 pre valve closed
11/3/2010	3:39:30 PM	SiCl4 post valve closed
11/3/2010	3:39:30 PM	Bubbler valve closed
11/3/2010	3:39:30 PM	Main Vac valve opened
11/3/2010	3:39:30 PM	Bypass valve opened
11/3/2010	3:39:30 PM	Helium MFC set to  0.000000
11/3/2010	3:39:30 PM	H2 MFC set to  0.000000
11/3/2010	3:39:30 PM	BCl3 MFC set to  0.000000
11/3/2010	3:39:30 PM	PHl3 MFC set to  0.000000
11/3/2010	3:39:30 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:39:30 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:39:30 PM	Tube furnace set to 0
11/3/2010	3:40:30 PM	H2 valve closed
11/3/2010	3:40:30 PM	BCl3 valve closed
11/3/2010	3:40:30 PM	PH3 valve closed
11/3/2010	3:40:30 PM	SiCl4 pre valve closed
11/3/2010	3:40:30 PM	SiCl4 post valve closed
11/3/2010	3:40:30 PM	Bubbler valve closed
11/3/2010	3:40:30 PM	Helium valve opened
11/3/2010	3:40:30 PM	Main Vac valve opened
11/3/2010	3:40:30 PM	Bypass valve opened
11/3/2010	3:40:30 PM	Helium MFC set to  100.000000
11/3/2010	3:40:30 PM	H2 MFC set to  0.000000
11/3/2010	3:40:30 PM	BCl3 MFC set to  0.000000
11/3/2010	3:40:30 PM	PHl3 MFC set to  0.000000
11/3/2010	3:40:30 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:40:30 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:40:31 PM	Tube furnace set to 0
11/3/2010	3:41:31 PM	Helium valve closed
11/3/2010	3:41:31 PM	H2 valve closed
11/3/2010	3:41:31 PM	BCl3 valve closed
11/3/2010	3:41:31 PM	PH3 valve closed
11/3/2010	3:41:31 PM	SiCl4 pre valve closed
11/3/2010	3:41:31 PM	SiCl4 post valve closed
11/3/2010	3:41:31 PM	Bubbler valve closed
11/3/2010	3:41:31 PM	Main Vac valve opened
11/3/2010	3:41:31 PM	Bypass valve opened
11/3/2010	3:41:31 PM	Helium MFC set to  0.000000
11/3/2010	3:41:31 PM	H2 MFC set to  0.000000
11/3/2010	3:41:31 PM	BCl3 MFC set to  0.000000
11/3/2010	3:41:31 PM	PHl3 MFC set to  0.000000
11/3/2010	3:41:31 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:41:31 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:41:31 PM	Tube furnace set to 0
11/3/2010	3:42:31 PM	H2 valve closed
11/3/2010	3:42:31 PM	BCl3 valve closed
11/3/2010	3:42:31 PM	PH3 valve closed
11/3/2010	3:42:31 PM	SiCl4 pre valve closed
11/3/2010	3:42:31 PM	SiCl4 post valve closed
11/3/2010	3:42:31 PM	Bubbler valve closed
11/3/2010	3:42:31 PM	Helium valve opened
11/3/2010	3:42:31 PM	Main Vac valve opened
11/3/2010	3:42:31 PM	Bypass valve opened
11/3/2010	3:42:31 PM	Helium MFC set to  100.000000
11/3/2010	3:42:31 PM	H2 MFC set to  0.000000
11/3/2010	3:42:31 PM	BCl3 MFC set to  0.000000
11/3/2010	3:42:31 PM	PHl3 MFC set to  0.000000
11/3/2010	3:42:31 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:42:31 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:42:31 PM	Tube furnace set to 0
11/3/2010	3:43:31 PM	Helium valve closed
11/3/2010	3:43:31 PM	H2 valve closed
11/3/2010	3:43:31 PM	BCl3 valve closed
11/3/2010	3:43:31 PM	PH3 valve closed
11/3/2010	3:43:31 PM	SiCl4 pre valve closed
11/3/2010	3:43:31 PM	SiCl4 post valve closed
11/3/2010	3:43:31 PM	Bubbler valve closed
11/3/2010	3:43:31 PM	Main Vac valve opened
11/3/2010	3:43:31 PM	Bypass valve opened
11/3/2010	3:43:31 PM	Helium MFC set to  0.000000
11/3/2010	3:43:31 PM	H2 MFC set to  0.000000
11/3/2010	3:43:31 PM	BCl3 MFC set to  0.000000
11/3/2010	3:43:31 PM	PHl3 MFC set to  0.000000
11/3/2010	3:43:31 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:43:31 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:43:31 PM	Tube furnace set to 0
11/3/2010	3:44:31 PM	H2 valve closed
11/3/2010	3:44:31 PM	BCl3 valve closed
11/3/2010	3:44:31 PM	PH3 valve closed
11/3/2010	3:44:31 PM	SiCl4 pre valve closed
11/3/2010	3:44:31 PM	SiCl4 post valve closed
11/3/2010	3:44:31 PM	Bubbler valve closed
11/3/2010	3:44:31 PM	Helium valve opened
11/3/2010	3:44:31 PM	Main Vac valve opened
11/3/2010	3:44:31 PM	Bypass valve opened
11/3/2010	3:44:31 PM	Helium MFC set to  100.000000
11/3/2010	3:44:31 PM	H2 MFC set to  0.000000
11/3/2010	3:44:31 PM	BCl3 MFC set to  0.000000
11/3/2010	3:44:31 PM	PHl3 MFC set to  0.000000
11/3/2010	3:44:31 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:44:31 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:44:31 PM	Tube furnace set to 0
11/3/2010	3:45:31 PM	Helium valve closed
11/3/2010	3:45:31 PM	H2 valve closed
11/3/2010	3:45:31 PM	BCl3 valve closed
11/3/2010	3:45:31 PM	PH3 valve closed
11/3/2010	3:45:31 PM	SiCl4 pre valve closed
11/3/2010	3:45:31 PM	SiCl4 post valve closed
11/3/2010	3:45:31 PM	Bubbler valve closed
11/3/2010	3:45:31 PM	Main Vac valve opened
11/3/2010	3:45:31 PM	Bypass valve opened
11/3/2010	3:45:31 PM	Helium MFC set to  0.000000
11/3/2010	3:45:31 PM	H2 MFC set to  0.000000
11/3/2010	3:45:31 PM	BCl3 MFC set to  0.000000
11/3/2010	3:45:31 PM	PHl3 MFC set to  0.000000
11/3/2010	3:45:31 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:45:31 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:45:32 PM	Tube furnace set to 0
11/3/2010	3:46:32 PM	H2 valve closed
11/3/2010	3:46:32 PM	BCl3 valve closed
11/3/2010	3:46:32 PM	PH3 valve closed
11/3/2010	3:46:32 PM	SiCl4 pre valve closed
11/3/2010	3:46:32 PM	SiCl4 post valve closed
11/3/2010	3:46:32 PM	Bubbler valve closed
11/3/2010	3:46:32 PM	Helium valve opened
11/3/2010	3:46:32 PM	Main Vac valve opened
11/3/2010	3:46:32 PM	Bypass valve opened
11/3/2010	3:46:32 PM	Helium MFC set to  100.000000
11/3/2010	3:46:32 PM	H2 MFC set to  0.000000
11/3/2010	3:46:32 PM	BCl3 MFC set to  0.000000
11/3/2010	3:46:32 PM	PHl3 MFC set to  0.000000
11/3/2010	3:46:32 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:46:32 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:46:32 PM	Tube furnace set to 0
11/3/2010	3:47:32 PM	Helium valve closed
11/3/2010	3:47:32 PM	H2 valve closed
11/3/2010	3:47:32 PM	BCl3 valve closed
11/3/2010	3:47:32 PM	PH3 valve closed
11/3/2010	3:47:32 PM	SiCl4 pre valve closed
11/3/2010	3:47:32 PM	SiCl4 post valve closed
11/3/2010	3:47:32 PM	Bubbler valve closed
11/3/2010	3:47:32 PM	Main Vac valve opened
11/3/2010	3:47:32 PM	Bypass valve opened
11/3/2010	3:47:32 PM	Helium MFC set to  0.000000
11/3/2010	3:47:32 PM	H2 MFC set to  0.000000
11/3/2010	3:47:32 PM	BCl3 MFC set to  0.000000
11/3/2010	3:47:32 PM	PHl3 MFC set to  0.000000
11/3/2010	3:47:32 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:47:32 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:47:32 PM	Tube furnace set to 0
11/3/2010	3:48:32 PM	H2 valve closed
11/3/2010	3:48:32 PM	BCl3 valve closed
11/3/2010	3:48:32 PM	PH3 valve closed
11/3/2010	3:48:32 PM	SiCl4 pre valve closed
11/3/2010	3:48:32 PM	SiCl4 post valve closed
11/3/2010	3:48:32 PM	Bubbler valve closed
11/3/2010	3:48:32 PM	Helium valve opened
11/3/2010	3:48:32 PM	Main Vac valve opened
11/3/2010	3:48:32 PM	Bypass valve opened
11/3/2010	3:48:32 PM	Helium MFC set to  100.000000
11/3/2010	3:48:32 PM	H2 MFC set to  0.000000
11/3/2010	3:48:32 PM	BCl3 MFC set to  0.000000
11/3/2010	3:48:32 PM	PHl3 MFC set to  0.000000
11/3/2010	3:48:32 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:48:32 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:48:32 PM	Tube furnace set to 0
11/3/2010	3:49:08 PM	Run aborted at 3:49 PM
11/3/2010	3:49:08 PM	Helium valve closed
11/3/2010	3:49:08 PM	H2 valve closed
11/3/2010	3:49:08 PM	BCl3 valve closed
11/3/2010	3:49:08 PM	PH3 valve closed
11/3/2010	3:49:08 PM	SiCl4 pre valve closed
11/3/2010	3:49:08 PM	SiCl4 post valve closed
11/3/2010	3:49:08 PM	Bypass valve closed
11/3/2010	3:49:08 PM	Main Vac valve closed
11/3/2010	3:49:08 PM	Bubbler valve closed
11/3/2010	3:49:08 PM	Helium MFC set to  0.000000
11/3/2010	3:49:08 PM	H2 MFC set to  0.000000
11/3/2010	3:49:08 PM	BCl3 MFC set to  0.000000
11/3/2010	3:49:08 PM	PHl3 MFC set to  0.000000
11/3/2010	3:49:08 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:49:08 PM	Tube furnace set to 0
11/3/2010	3:49:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/3/2010	3:49:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2010	3:49:10 PM	Recipe started at 3:49 PM
11/3/2010	3:49:10 PM	Helium valve closed
11/3/2010	3:49:10 PM	H2 valve closed
11/3/2010	3:49:10 PM	BCl3 valve closed
11/3/2010	3:49:10 PM	PH3 valve closed
11/3/2010	3:49:10 PM	SiCl4 pre valve closed
11/3/2010	3:49:10 PM	SiCl4 post valve closed
11/3/2010	3:49:10 PM	Main Vac valve closed
11/3/2010	3:49:10 PM	Bubbler valve closed
11/3/2010	3:49:10 PM	Bypass valve opened
11/3/2010	3:49:10 PM	Helium MFC set to  0.000000
11/3/2010	3:49:10 PM	H2 MFC set to  0.000000
11/3/2010	3:49:10 PM	BCl3 MFC set to  0.000000
11/3/2010	3:49:10 PM	PHl3 MFC set to  0.000000
11/3/2010	3:49:10 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:49:10 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:49:10 PM	Tube furnace set to 0
11/3/2010	3:49:11 PM	Helium valve closed
11/3/2010	3:49:11 PM	H2 valve closed
11/3/2010	3:49:11 PM	BCl3 valve closed
11/3/2010	3:49:11 PM	PH3 valve closed
11/3/2010	3:49:11 PM	SiCl4 pre valve closed
11/3/2010	3:49:11 PM	SiCl4 post valve closed
11/3/2010	3:49:11 PM	Bubbler valve closed
11/3/2010	3:49:11 PM	Main Vac valve opened
11/3/2010	3:49:11 PM	Bypass valve opened
11/3/2010	3:49:11 PM	Helium MFC set to  0.000000
11/3/2010	3:49:11 PM	H2 MFC set to  0.000000
11/3/2010	3:49:11 PM	BCl3 MFC set to  0.000000
11/3/2010	3:49:11 PM	PHl3 MFC set to  0.000000
11/3/2010	3:49:11 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:49:11 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:49:11 PM	Tube furnace set to 0
11/3/2010	3:49:11 PM	Run finished at 3:49 PM
11/3/2010	3:49:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/3/2010	3:50:42 PM	Recipe started at 3:50 PM
11/3/2010	3:50:42 PM	Helium valve closed
11/3/2010	3:50:42 PM	BCl3 valve closed
11/3/2010	3:50:42 PM	PH3 valve closed
11/3/2010	3:50:42 PM	SiCl4 pre valve closed
11/3/2010	3:50:42 PM	SiCl4 post valve closed
11/3/2010	3:50:42 PM	Main Vac valve closed
11/3/2010	3:50:42 PM	Bypass valve closed
11/3/2010	3:50:42 PM	Bubbler valve closed
11/3/2010	3:50:42 PM	H2 valve opened
11/3/2010	3:50:42 PM	Helium MFC set to  0.000000
11/3/2010	3:50:42 PM	H2 MFC set to  500.000000
11/3/2010	3:50:42 PM	BCl3 MFC set to  0.000000
11/3/2010	3:50:42 PM	PHl3 MFC set to  0.000000
11/3/2010	3:50:42 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:50:42 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:50:43 PM	Tube furnace set to 0
11/3/2010	3:52:06 PM	Helium valve closed
11/3/2010	3:52:06 PM	BCl3 valve closed
11/3/2010	3:52:06 PM	PH3 valve closed
11/3/2010	3:52:06 PM	SiCl4 pre valve closed
11/3/2010	3:52:06 PM	SiCl4 post valve closed
11/3/2010	3:52:06 PM	Main Vac valve closed
11/3/2010	3:52:06 PM	Bypass valve closed
11/3/2010	3:52:06 PM	H2 valve opened
11/3/2010	3:52:06 PM	Bubbler valve opened
11/3/2010	3:52:06 PM	Helium MFC set to  0.000000
11/3/2010	3:52:06 PM	H2 MFC set to  500.000000
11/3/2010	3:52:06 PM	BCl3 MFC set to  0.000000
11/3/2010	3:52:06 PM	PHl3 MFC set to  0.000000
11/3/2010	3:52:06 PM	SiCl4 MFC set to  0.000000
11/3/2010	3:52:06 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	3:52:06 PM	Tube furnace set to 1000
11/3/2010	4:01:49 PM	Helium valve closed
11/3/2010	4:01:49 PM	PH3 valve closed
11/3/2010	4:01:49 PM	Main Vac valve closed
11/3/2010	4:01:49 PM	Bypass valve closed
11/3/2010	4:01:49 PM	H2 valve opened
11/3/2010	4:01:49 PM	BCl3 valve opened
11/3/2010	4:01:49 PM	SiCl4 pre valve opened
11/3/2010	4:01:49 PM	SiCl4 post valve opened
11/3/2010	4:01:49 PM	Bubbler valve opened
11/3/2010	4:01:49 PM	Helium MFC set to  0.000000
11/3/2010	4:01:49 PM	H2 MFC set to  500.000000
11/3/2010	4:01:49 PM	BCl3 MFC set to  10.000000
11/3/2010	4:01:49 PM	PHl3 MFC set to  0.000000
11/3/2010	4:01:49 PM	SiCl4 MFC set to  50.000000
11/3/2010	4:01:49 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	4:01:49 PM	Tube furnace set to 1000
11/3/2010	4:05:13 PM	Helium valve closed
11/3/2010	4:05:13 PM	PH3 valve closed
11/3/2010	4:05:13 PM	Main Vac valve closed
11/3/2010	4:05:13 PM	Bypass valve closed
11/3/2010	4:05:13 PM	H2 valve opened
11/3/2010	4:05:13 PM	BCl3 valve opened
11/3/2010	4:05:13 PM	SiCl4 pre valve opened
11/3/2010	4:05:13 PM	SiCl4 post valve opened
11/3/2010	4:05:13 PM	Bubbler valve opened
11/3/2010	4:05:13 PM	Helium MFC set to  0.000000
11/3/2010	4:05:14 PM	H2 MFC set to  500.000000
11/3/2010	4:05:14 PM	BCl3 MFC set to  10.000000
11/3/2010	4:05:14 PM	PHl3 MFC set to  0.000000
11/3/2010	4:05:14 PM	SiCl4 MFC set to  50.000000
11/3/2010	4:05:14 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	4:05:14 PM	Tube furnace set to 1000
11/3/2010	4:10:14 PM	H2 valve closed
11/3/2010	4:10:14 PM	BCl3 valve closed
11/3/2010	4:10:14 PM	PH3 valve closed
11/3/2010	4:10:14 PM	SiCl4 pre valve closed
11/3/2010	4:10:14 PM	SiCl4 post valve closed
11/3/2010	4:10:14 PM	Main Vac valve closed
11/3/2010	4:10:14 PM	Bypass valve closed
11/3/2010	4:10:14 PM	Helium valve opened
11/3/2010	4:10:14 PM	Bubbler valve opened
11/3/2010	4:10:14 PM	Helium MFC set to  500.000000
11/3/2010	4:10:14 PM	H2 MFC set to  0.000000
11/3/2010	4:10:14 PM	BCl3 MFC set to  0.000000
11/3/2010	4:10:14 PM	PHl3 MFC set to  0.000000
11/3/2010	4:10:14 PM	SiCl4 MFC set to  0.000000
11/3/2010	4:10:14 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	4:10:14 PM	Tube furnace set to 0
11/3/2010	4:30:14 PM	Helium valve closed
11/3/2010	4:30:14 PM	H2 valve closed
11/3/2010	4:30:14 PM	BCl3 valve closed
11/3/2010	4:30:14 PM	PH3 valve closed
11/3/2010	4:30:14 PM	SiCl4 pre valve closed
11/3/2010	4:30:14 PM	SiCl4 post valve closed
11/3/2010	4:30:14 PM	Main Vac valve closed
11/3/2010	4:30:14 PM	Bypass valve closed
11/3/2010	4:30:14 PM	Bubbler valve closed
11/3/2010	4:30:14 PM	Helium MFC set to  0.000000
11/3/2010	4:30:14 PM	H2 MFC set to  0.000000
11/3/2010	4:30:14 PM	BCl3 MFC set to  0.000000
11/3/2010	4:30:14 PM	PHl3 MFC set to  0.000000
11/3/2010	4:30:14 PM	SiCl4 MFC set to  0.000000
11/3/2010	4:30:14 PM	Bypass solenoid MFC set to  0.000000
11/3/2010	4:30:14 PM	Tube furnace set to 0
11/3/2010	4:30:14 PM	Run finished at 4:30 PM
